Binary matrices of optimal autocorrelations as alignment marks
Name
Soljacic_Binary matrices.pdf
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299.02 KB
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Adobe PDF
Checksum (MD5)
78af76a097810823d0452d03dde6d2af
Author(s)
Skirlo, Scott A.
Lu, Ling
Soljacic, Marin
Date Issued
February 2015
Journal
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
Publisher
American Vacuum Society (AVS)
Citation
Skirlo, Scott A.; Lu, Ling and Soljačić, Marin. "Binary matrices of optimal autocorrelations as alignment marks." Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena 33, no. 2 (February 2015).
Version
Author's final manuscript
Abstract
The authors define a new class of binary matrices by maximizing the peak-sidelobe distances in the aperiodic autocorrelations. These matrices can be used as robust position marks for in-plane translational spatial alignment. The optimal square matrices of dimensions up to 7 × 7 and optimal diagonally symmetric matrices of 8 × 8 and 9 × 9 were found by exhaustive searches.
MIT Department
Massachusetts Institute of Technology. Department of Physics
Terms of Use
Creative Commons Attribution-Noncommercial-Share Alike
Persistent DSpace Link
DOI of Published Version
https://doi.org/10.1116/1.4913316
