Transparent amorphous silicon channel waveguides and high-Q resonators using a damascene process
Name
Kimerling_Transparent amorphous.pdf
Size
391.05 KB
Format
Adobe PDF
Checksum (MD5)
e3f5badabc4945e14f6338580ae00d27
Author(s)
Sun, Rong
Cheng, Jing
Michel, Jurgen
Kimerling, Lionel C.
Date Issued
July 2009
Journal
Optics Letters
Publisher
Optical Society of America
Citation
Sun, Rong, Jing Cheng, Jurgen Michel, and Lionel Kimerling. “Transparent amorphous silicon channel waveguides and high-Q resonators using a damascene process.” Optics Letters 34, no. 15 (July 31, 2009): 2378.© 2009 Optical Society of America.
Version
Final published version
Abstract
We demonstrate a damascene process for fabricating amorphous silicon (a-Si), single-mode optical channel waveguides and high-Q racetrack resonators. This process is compatible with thermal budget limitations for a-Si phase stability. It offers improved optical transmission and facilitates hydrogen encapsulation for process integration of a-Si waveguide cores. At 1550 nm , the average measured transmission loss coefficient is 2.5±0.1 dB/cm for the TE mode, comparable with high-quality single crystalline silicon counterparts. The racetrack resonators have mid- 10[superscript 4] to 10[superscript 5] quality factors (Q) and extinction ratios as high as 25 dB .
MIT Department
Massachusetts Institute of Technology. Department of Materials Science and Engineering
Massachusetts Institute of Technology. Microphotonics Center
Terms of Use
Article is made available in accordance with the publisher's policy and may be subject to US copyright law. Please refer to the publisher's site for terms of use.
Persistent DSpace Link
DOI of Published Version
https://doi.org/10.1364/OL.34.002378
