Assessment of an infrared camera for use as a control sensor for the chemical mechanical planarization process
Name
43555718-MIT.pdf
Description
Full printable version
Size
3.27 MB
Format
Adobe PDF
Checksum (MD5)
b6eca5aa25e1ac2bfdc0405d045dfa6b
Author(s)
Nishimoto, Angie Shizue, 1977-
Advisor(s)
Duane S. Boning.
Alternative Title
Assessment of an infrared camera for use as a control sensor for the CMP
Assessment of an infrared sensor for control of chemical mechanical planarization
Date Issued
1999
Publisher
Massachusetts Institute of Technology
Description
Thesis (S.B. and M.Eng.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1999.
Includes bibliographical references (leaf 40).
Subjects
Electrical Engineering and Computer Science
MIT Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
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