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  5. Optimization of process variables in extrusion-spin coating

Optimization of process variables in extrusion-spin coating

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Author(s)
Han, Sangjun, 1972-
Advisor(s)
Jung-Hoon Chun.
Date Issued
1997
Publisher
Massachusetts Institute of Technology
Description
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1997.
Includes bibliographical references (p. 83-84).
Subjects
Mechanical Engineering.
MIT Department
Massachusetts Institute of Technology. Department of Mechanical Engineering
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http://dspace.mit.edu/handle/1721.1/7582
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http://hdl.handle.net/1721.1/43576
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