Photo-induced trimming of chalcogenide-assisted silicon waveguides
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Kimerling_Photo-induced.pdf
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990 KB
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Checksum (MD5)
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Author(s)
Kimerling, Lionel C.
Canciamilla, Antonio
Morichetti, Francesco
Grillanda, Stefano
Velha, Philippe
Sorel, Marc
Singh, Vivek
Agarwal, Anuradha Murthy
Melloni, Andrea
Date Issued
June 2012
Journal
Optics Express
Publisher
Optical Society of America
Citation
Canciamilla, Antonio et al. “Photo-induced Trimming of Chalcogenide-assisted Silicon Waveguides.” Optics Express 20.14 (2012): 15807. © 2012 OSA
Version
Final published version
Abstract
A chalcogenide-assisted silicon waveguide is realized by depositing a thin layer of A[subscript 2]S[subscript 3] glass onto a conventional silicon on insulator optical waveguide. The photosensitivity of the chalcogenide is exploited to locally change the optical properties of the waveguide through exposure to visible light radiation. Waveguide trimming is experimentally demonstrated by permanently shifting the resonant wavelength of a microring resonator by 6.7 nm, corresponding to an effective index increase of 1.6·10[superscript −2]. Saturation effects, trimming range, velocity and temporal stability of the process are discussed in details. Results demonstrate that photo-induced treatments can be exploited for a post-fabrication compensation of fabrication tolerances, as well as to set and reconfigure the circuit response.
MIT Department
MIT Materials Research Laboratory
Massachusetts Institute of Technology. Microphotonics Center
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Article is made available in accordance with the publisher's policy and may be subject to US copyright law. Please refer to the publisher's site for terms of use.
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DOI of Published Version
https://doi.org/10.1364/OE.20.015807
