Direct printing of lead zirconate titanate thin films
Name
247013547-MIT.pdf
Description
Full printable version
Size
7.96 MB
Format
Adobe PDF
Checksum (MD5)
43d13388776b83d21f3c2fd6d7a1b4e8
Author(s)
Bathurst, Stephen, 1980-
Advisor(s)
Sang Gook Kim.
Alternative Title
Direct printing of PZT thin films
Date Issued
2008
Publisher
Massachusetts Institute of Technology
Abstract
Thus far, use of lead zirconate titanate (PZT) in MEMS has been limited due to the lack of process compatibility with existing MEMS manufacturing techniques. Direct printing of thin films eliminates the need for photolithographic patterning and etching, as well as allows for controlled deposition over non-planar topographies which cannot be accomplished with conventional spin coating processes. This thesis reports the optimal conditions of deposition and crystallization for high dielectric quality PZT thin films via thermal ink jet printing. Included are details of the solution chemistry developed, printing conditions required for MEMS quality films, and thermal processing parameters that enable a strong piezoelectric response.
Description
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2008.
Includes bibliographical references (leaves 42-44).
Subjects
Mechanical Engineering.
MIT Department
Massachusetts Institute of Technology. Department of Mechanical Engineering
Terms of Use
M.I.T. theses are protected by
copyright. They may be viewed from this source for any purpose, but
reproduction or distribution in any format is prohibited without written
permission. See provided URL for inquiries about permission.
copyright. They may be viewed from this source for any purpose, but
reproduction or distribution in any format is prohibited without written
permission. See provided URL for inquiries about permission.
Persistent DSpace Link
