Screening experiment for a polysilicon gate etch chamber

Levis, Kim-Marie, 1976-

Screening experiment for a polysilicon gate etch chamber

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Author(s)

Levis, Kim-Marie, 1976-

Advisor(s)

Gerald Benard and Klavs F. Jensen.

Date Issued

1999

Publisher

Massachusetts Institute of Technology

Description

Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1999.

Includes bibliographical references (leaf 53).

Subjects

Materials Science and Engineering.

MIT Department

Massachusetts Institute of Technology. Department of Materials Science and Engineering

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