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Beam simulation studies of plasma-surface interactions in fluorocarbon etching of Si and SiO2

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Author(s)
Gray, David Charles
Advisor(s)
Herbert H. Sawin.
Date Issued
1992
Publisher
Massachusetts Institute of Technology
Description
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1992.
Includes bibliographical references (p. 376-384).
Subjects
Chemical Engineering
MIT Department
Massachusetts Institute of Technology. Department of Chemical Engineering
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