A white light interferometer for improved achromatic holographic lithography
Name
29737097-MIT.pdf
Description
Full printable version
Size
1.44 MB
Format
Adobe PDF
Checksum (MD5)
447fb01f534743521e4c8694365f1ca2
Author(s)
Shah, Satyen N. (Satyen Navin)
Advisor(s)
Henry I. Smith.
Date Issued
1993
Publisher
Massachusetts Institute of Technology
Description
Thesis (B.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1993.
Includes bibliographical references (leaf 27).
Subjects
Electrical Engineering and Computer Science
MIT Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
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