Silver nanoparticle structures realized by digital surface micromachining
Name
Lam-2009-Silver nanoparticle structures realized by digital surface micromachining.pdf
Size
2.14 MB
Format
Adobe PDF
Checksum (MD5)
a20f541a4b122721da56bef5f7443598
Author(s)
Schmidt, Martin Arnold
Lam, Eric Wing-Jing
Li, Hanqing
Date Issued
October 2009
Journal
International Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009
Publisher
Institute of Electrical and Electronics Engineers
Citation
Lam, E.W., H. Li, and M.A. Schmidt. “Silver nanoparticle structures realized by digital surface micromachining.” Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International. 2009. 1698-1701. ©2009 Institute of Electrical and Electronics Engineers.
Version
Final published version
Abstract
We report a new surface micromachining process using commercial silver nanoparticle inks and digital fabrication methods. This process is entirely digital (non-lithographic patterning), the feature sizes can be <20 mum, and the maximum temperature is less than 250degC. Furthermore, we have completed materials property characterization in order to enable design in this process. As a demonstration, silver cantilevers were fabricated using this process and subsequently characterized to determine the silver film's mechanical properties.
Subjects
MEMS
Inkjet
Nanoparticles
Printing
MIT Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Massachusetts Institute of Technology. Microsystems Technology Laboratories
Terms of Use
Article is made available in accordance with the publisher's policy and may be subject to US copyright law. Please refer to the publisher's site for terms of use.
Persistent DSpace Link
DOI of Published Version
https://doi.org/10.1109/SENSOR.2009.5285759
