Scalable fabrication of coupled NV center - photonic crystal cavity systems by self-aligned N ion implantation
Name
ome-7-5-1514.pdf
Description
Published version
Size
7.46 MB
Format
Unknown
Checksum (MD5)
a51225a3279b7b7954212834ab84ea11
Author(s)
Schröder, T.
Walsh, M.
Zheng, J.
Mouradian, S.
Li, L.
Malladi, G.
Bakhru, H.
Lu, M.
Stein, A.
Heuck, M.
Date Issued
April 2017
Journal
Optical Materials Express
Publisher
Optical Society of America
Citation
Schroder, T., et al. "Scalable Fabrication of Coupled Nv Center-Photonic Crystal Cavity Systems by Self-Aligned N Ion Implantation." Optical Materials Express 7 5 (2017): 1514-24.
Version
Final published version
Abstract
© 2017 Optical Society of America. Towards building large-scale integrated photonic systems for quantum information processing, spatial and spectral alignment of single quantum systems to photonic nanocavities is required. Here, we demonstrate spatially targeted implantation of nitrogen vacancy (NV) centers into the mode maximum of 2-d diamond photonic crystal cavities with quality factors up to 8000, achieving an average of 1:1 ± 0:2 NVs per cavity. Nearly all NV-cavity systems have significant emission intensity enhancement, reaching a cavity-fed spectrally selective intensity enhancement, Fint, of up to 93. Although spatial NV-cavity overlap is nearly guaranteed within about 40 nm, spectral tuning of the NV's zero-phonon-line (ZPL) is still necessary after fabrication. To demonstrate spectral control, we temperature tune a cavity into an NV ZPL, yielding FZPLint 5 at cryogenic temperatures.
MIT Department
Massachusetts Institute of Technology. Research Laboratory of Electronics
Terms of Use
Article is made available in accordance with the publisher's policy and may be subject to US copyright law. Please refer to the publisher's site for terms of use.
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DOI of Published Version
https://doi.org/10.1364/ome.7.001514
