Automated remote microscope for inspection of integrated circuits
Name
38198525-MIT.pdf
Description
Full printable version
Size
6.34 MB
Format
Adobe PDF
Checksum (MD5)
67c9461386900c9fa5428c38eb05e586
Author(s)
Kittipiyakul, Somsak
Advisor(s)
Donald E. Troxel.
Date Issued
1996
Publisher
Massachusetts Institute of Technology
Description
Thesis (M. Eng.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1996.
Includes bibliographical references (p. 99-100).
Subjects
Electrical Engineering and Computer Science
MIT Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Terms of Use
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