Spatial yield modeling for semiconductor wafers

Mirza, Agha Irtaza

Spatial yield modeling for semiconductor wafers

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Author(s)

Mirza, Agha Irtaza

Advisor(s)

Alvin W. Drake.

Date Issued

1995

Publisher

Massachusetts Institute of Technology

Description

Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1995.

Includes bibliographical references (p. 123-124).

Subjects

Electrical Engineering and Computer Science

MIT Department

Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science

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