Templating Three-Dimensional Self-Assembled Structures in Bilayer Block Copolymer Films
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Berggren_Templating three.pdf
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Author(s)
Gotrik, Kevin W.
Tavakkoli Kermani Ghariehali, Amir
Hannon, Adam F.
Alexander-Katz, Alfredo
Ross, Caroline A.
Berggren, Karl K.
Date Issued
June 2012
Journal
Science
Publisher
American Association for the Advancement of Science (AAAS)
Citation
Tavakkoli K. G., A., K. W. Gotrik, A. F. Hannon, A. Alexander-Katz, C. A. Ross, and K. K. Berggren. “Templating Three-Dimensional Self-Assembled Structures in Bilayer Block Copolymer Films.” Science 336, no. 6086 (June 8, 2012): 1294–1298.
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Author's final manuscript
Abstract
The registration and alignment of a monolayer of microdomains in a self-assembled block copolymer thin film can be controlled by chemical or physical templating methods. Although planar patterns are useful for nanoscale device fabrication, three-dimensional multilevel structures are required for some applications. We found that a bilayer film of a cylindrical-morphology block copolymer, templated by an array of posts functionalized with a brush attractive to the majority block, can form a rich variety of three-dimensional structures consisting of cylinder arrays with controllable angles, bends, and junctions whose geometry is controlled by the template periodicity and arrangement. This technique allows control of microdomain patterns and the ability to route and connect microdomains in specific directions.
MIT Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Massachusetts Institute of Technology. Department of Materials Science and Engineering
Massachusetts Institute of Technology. Research Laboratory of Electronics
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DOI of Published Version
https://doi.org/10.1126/science.1218437
