Analysis and mitigation of interface losses in trenched superconducting coplanar waveguide resonators
Name
1.5006888.pdf
Description
Published version
Size
1.1 MB
Format
Adobe PDF
Checksum (MD5)
05f04ced186774b1454d81633a727b6d
Author(s)
Calusine, G
Melville, A
Woods, W
Das, R
Stull, C
Bolkhovsky, V
Braje, D
Hover, D
Kim, DK
Miloshi, X
Date Issued
2018
Journal
Applied Physics Letters
Publisher
AIP Publishing
Version
Final published version
Abstract
© 2018 Author(s). Improving the performance of superconducting qubits and resonators generally results from a combination of materials and fabrication process improvements and design modifications that reduce device sensitivity to residual losses. One instance of this approach is to use trenching into the device substrate in combination with superconductors and dielectrics with low intrinsic losses to improve quality factors and coherence times. Here, we demonstrate titanium nitride coplanar waveguide resonators with mean quality factors exceeding two million and controlled trenching reaching 2.2 μm in the silicon substrate. Additionally, we measure sets of resonators with a range of sizes and trench depths and compare these results with finite-element simulations to demonstrate quantitative agreement with a model of interface dielectric loss. We then apply this analysis to determine the extent to which trenching can improve resonator performance.
MIT Department
Lincoln Laboratory
Massachusetts Institute of Technology. Research Laboratory of Electronics
Massachusetts Institute of Technology. Department of Physics
Terms of Use
Creative Commons Attribution 4.0 International license
Persistent DSpace Link
DOI of Published Version
https://doi.org/10.1063/1.5006888
