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Controlled and explosive silicidation of metal/amorphous-silicon multilayer thin films

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Author(s)
Clevenger, Lawrence Alfred
Advisor(s)
Carl V. Thompson.
Date Issued
1989
Publisher
Massachusetts Institute of Technology
Description
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1989.
Includes bibliographical references.
Subjects
Materials Science and Engineering.
MIT Department
Massachusetts Institute of Technology. Department of Materials Science and Engineering
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