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  5. Controlled and explosive silicidation of metal/amorphous-silicon multilayer thin films

Controlled and explosive silicidation of metal/amorphous-silicon multilayer thin films

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Author(s)
Clevenger, Lawrence Alfred
Advisor(s)
Carl V. Thompson.
Date Issued
1989
Publisher
Massachusetts Institute of Technology
Description
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1989.
Includes bibliographical references.
Subjects
Materials Science and Engineering.
MIT Department
Massachusetts Institute of Technology. Department of Materials Science and Engineering
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M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission.
http://dspace.mit.edu/handle/1721.1/7582
Persistent DSpace Link
http://hdl.handle.net/1721.1/14210
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