Large-area CVD growth of two-dimensional transition metal dichalcogenides and monolayer MoS₂ and WS₂ metal-oxide-semiconductor field-effect transistors
Name
1006507317-MIT.pdf
Description
Full printable version
Size
3.54 MB
Format
Adobe PDF
Checksum (MD5)
c72d5e3168bbaaf2fdb3655eca74c2fd
Author(s)
Shen, Pin-Chun
Advisor(s)
Jing Kong.
Alternative Title
Large-area chemical vapor deposition growth of two-dimensional transition metal dichalcogenides and monolayer MoS₂ and WS₂ metal-oxide-semiconductor field-effect transistors
Date Issued
2017
Publisher
Massachusetts Institute of Technology
Abstract
Two-dimensional semiconducting materials such as MoS₂ and WS₂ have been attractive for use in ultra-scaled electronic and optoelectronic devices because of their atomically-thin thickness, direct band gap, and lack of dangling bonds. Methods for large-area growth of 2D semiconducting materials are needed to bring them to practical applications. This thesis aims to develop reliable methods for growing high-quality monolayer MoS₂ and WS₂ by CVD and explore their intrinsic electrical transport properties for electronic and optoelectronic device applications. The as-grown monolayer MoS₂ and WS₂ exhibit n-type semiconducting behavior with excellent optical properties. Various techniques are employed to characterize the CVD-grown materials, including photoluminescence, UV-visible absorption, Raman spectroscopy, X-ray photoelectron spectroscopy, and atomic force microscopy. Moreover, the electronic transport characteristics of single-layer CVD-grown MoS₂ and WS₂ field-effect transistors with a back-gated configuration are demonstrated.
Description
Thesis: S.M., Massachusetts Institute of Technology, Department of Electrical Engineering and Computer Science, 2017.
This electronic version was submitted by the student author. The certified thesis is available in the Institute Archives and Special Collections.
Cataloged from student-submitted PDF version of thesis.
Includes bibliographical references (pages 54-55).
Subjects
Electrical Engineering and Computer Science.
MIT Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
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