High speed electron-beam dose modulation by electrostatic quadra-deflection
Name
43442998-MIT.pdf
Description
Full printable version
Size
2.93 MB
Format
Adobe PDF
Checksum (MD5)
708450d6addf1d3e611edf26d899cf4b
Author(s)
Bernshteyn, Aleksandr, 1975-
Advisor(s)
Henry I. Smith.
Alternative Title
High-speed electron-beam dose modulation by electrostatic quadruple electrostatic deflection
Date Issued
1999
Publisher
Massachusetts Institute of Technology
Description
Thesis (S.B. and M.Eng.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1999.
Includes bibliographical references (p. 47-49).
Subjects
Electrical Engineering and Computer Science
MIT Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
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copyright. They may be viewed from this source for any purpose, but
reproduction or distribution in any format is prohibited without written
permission. See provided URL for inquiries about permission.
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