Electrowetting-on-dielectric actuation of a spatial and angular manipulation MEMS stage
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Author(s)
Preston, Daniel John
Anders, Ariel S
Barabadi, Banafsheh
Tio, Evelyn
Zhu, Yangying
Dai, DingRan
Wang, Evelyn
Date Issued
January 2017
Journal
2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS)
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Citation
Preston, Daniel J., Ariel Anders, Banafsheh Barabadi, Evelyn Tio, Yangying Zhu, DingRan Annie Dai, and Evelyn N. Wang. “Electrowetting-on-Dielectric Actuation of a Spatial and Angular Manipulation MEMS Stage.” 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS) (January 2017).
Version
Author's final manuscript
Abstract
We demonstrate a MEMS translational stage that uses electrowetting-on-dielectric (EWOD) as the actuating mechanism. Our EWOD stage is capable of linear translation with resolution of 10 μm over a maximum range of 130 μm and angular deflection of approximately ±1° while eliminating solid-solid contact. The range and resolution can be readily improved via higher base contact angle and lower contact angle hysteresis as indicated by the detailed modeling accompanying the experimental demonstration.
MIT Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Massachusetts Institute of Technology. Department of Mechanical Engineering
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DOI of Published Version
https://doi.org/10.1109/MEMSYS.2017.7863521
