Application of quantum chemistry calculations in modeling chemical vapor deposition processes

Simka, Harsono Siem, 1969-

Application of quantum chemistry calculations in modeling chemical vapor deposition processes

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Author(s)

Simka, Harsono Siem, 1969-

Advisor(s)

Klavs F. Jensen.

Date Issued

1998

Publisher

Massachusetts Institute of Technology

Description

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1998.

Includes bibliographical references.

Subjects

Chemical Engineering

MIT Department

Massachusetts Institute of Technology. Department of Chemical Engineering

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