Electrostatic deflection of free-standing tungsten microbridges as a novel means for characterization of thin film mechanical properties
Name
32031484-MIT.pdf
Description
Full printable version
Size
4 MB
Format
Adobe PDF
Checksum (MD5)
2af86514daab87f05aa22fb498a16205
Author(s)
Huguenin, S. Carolene
Advisor(s)
C.V. Thompson, II.
Date Issued
1994
Publisher
Massachusetts Institute of Technology
Description
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1994.
Includes bibliographical references (leaves 58-59).
Subjects
Materials Science and Engineering
MIT Department
Massachusetts Institute of Technology. Department of Materials Science and Engineering
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