Microfabricated silicon electric mechanisms

Mehregany, Mehran

Microfabricated silicon electric mechanisms

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Author(s)

Mehregany, Mehran

Advisor(s)

Stephen D. Senturia.

Date Issued

1990

Publisher

Massachusetts Institute of Technology

Description

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1990.

Includes bibliographical references (leaves 151-156).

Subjects

Electrical Engineering and Computer Science.

MIT Department

Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science

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