In-situ wafer uniformity estimation using principal component analysis and function approximation methods
Name
33342484-MIT.pdf
Description
Full printable version
Size
5.52 MB
Format
Adobe PDF
Checksum (MD5)
a923a4bf12a5a911690eda1a5e80b85d
Author(s)
White, David A. (David Allan), 1966-
Advisor(s)
Michael Athans.
Date Issued
1995
Publisher
Massachusetts Institute of Technology
Description
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1995.
Includes bibliographical references (leaves 66-71).
Subjects
Electrical Engineering and Computer Science.
MIT Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Terms of Use
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