Variation reduction of a closed-loop precision ceramic micromachining process
Name
43071867-MIT.pdf
Description
Full printable version
Size
11.95 MB
Format
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Checksum (MD5)
8d4808881f18247c55dbe9657bf4c674
Author(s)
Fanger, David J. (David James)
Advisor(s)
James M. Utterback and Michael J. Cima.
Date Issued
1996
Publisher
Massachusetts Institute of Technology
Abstract
This report details the investigation of the micromachining of a TiC.A1203 ceramic using a closed-loop lapping process. Currently the micromachining process laps a ceramic bar with only a priori flatness adjustment. Bar flatness is adjusted prior to the lap using optical measurement of lithography targets. The average value of a critical dimension determines lap completion. The critical dimension is determined with an embedded electronic lapping guide (ELG). The problem with this technique, as it is currently employed, is high product loss due to large variance of the critical dimension across the bar. A six microinch standard deviation is desired. Any product above or below specified critical dimension limits are scrapped, so the variance reduction directly impacts immediate and downstream process yields. An alternative approach is proposed using electrostrictive actuators in a closed control loop to deform the bar during lap processing. The closed-loop lapping (CLL) process significantly decreases critical dimension process variance.
Description
Thesis (S.M.)--Massachusetts Institute of Technology, Sloan School of Management; and, (S.M.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1996.
Includes bibliographical references (p. 125-132).
Subjects
Sloan School of Management
Materials Science and Engineering
MIT Department
Massachusetts Institute of Technology. Department of Materials Science and Engineering
Sloan School of Management
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