Silicon microaccelerometer fabrication technologies
Name
38502766-MIT.pdf
Description
Full printable version
Size
43.63 MB
Format
Adobe PDF
Checksum (MD5)
ad910f9666819ce02fed4bf52127ee32
Author(s)
Hsu, Charles Heng-Yuan, 1967-
Advisor(s)
Martin A. Schmidt.
Date Issued
1997
Publisher
Massachusetts Institute of Technology
Description
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1997.
Includes bibliographical references (leaves 275-282).
Subjects
Electrical Engineering and Computer Science
MIT Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
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copyright. They may be viewed from this source for any purpose, but
reproduction or distribution in any format is prohibited without written
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