UV-solvent annealing of PDMS-majority and PS-majority PS-
Name
Ross_UV solvent annealing.pdf
Size
2.06 MB
Format
Adobe PDF
Checksum (MD5)
31859eb0af998b6fb14acb9e7290f733
Author(s)
Ntetsikas, K
Liontos, G
Avgeropoulos, A
Lee, Keehong
Kreider, Melissa E.
Bai, Wubin
Cheng, Li-Chen
Dinachali, Saman Safari
Tu, Kun-Hua
Huang, Tao
Date Issued
October 2016
Journal
Nanotechnology
Publisher
IOP Publishing
Citation
Lee, Keehong, et al. “UV-Solvent Annealing of PDMS-Majority and PS-Majority PS-b-PDMS Block Copolymer Films.” Nanotechnology 27, 46 (October 2016): 465301 © 2016 IOP Publishing Ltd
Version
Final published version
Abstract
The response of polystyrene-block-poly(dimethylsiloxane) (PS-b-PDMS) thin films to UV exposure during solvent vapor annealing is described, in order to improve their applicability in nanolithography and nanofabrication. Two BCPs were examined, one with the PS block as majority (f[subscript]PS = 68%, M[subscript n]= 53 kg mol[subscript -1]), the other with PDMS block as majority (f[subscript PDMS]= 67%, M[subscript n] = 44 kg mol [superscript -1] ). A 5 min UV irradiation was applied during solvent vapor annealing which led to both partial crosslinking of the polymer and a small increase in the temperature of the annealing chamber. This approach was effective for improving the correlation length of the self-assembled microdomain arrays and in limiting subsequent flow of the PDMS in the PDMS-majority BCP to preserve the post-anneal morphology. Ordering and orientation of microdomains were controlled by directed self-assembly of the BCPs in trench substrates. Highly-ordered perpendicular nanochannel arrays were obtained in the PDMS-majority BCP.
MIT Department
Massachusetts Institute of Technology. Department of Chemical Engineering
Massachusetts Institute of Technology. Department of Materials Science and Engineering
Terms of Use
Creative Commons Attribution 3.0 Unported license
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DOI of Published Version
https://doi.org/10.1088/0957-4484/27/46/465301
