Plasma oxidation of silicon : kinetics studies
Name
11904716-MIT.pdf
Description
Full printable version
Size
3.27 MB
Format
Adobe PDF
Checksum (MD5)
80ea4ec24669b69ccbd91aa6a9331dae
Author(s)
Chan, David Tai Wai
Advisor(s)
L.R. Reif.
Date Issued
1984
Publisher
Massachusetts Institute of Technology
Description
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1984.
MICROFICHE COPY AVAILABLE IN ARCHIVES AND ENGINEERING.
Includes bibliographical references.
Subjects
Electrical Engineering and Computer Science.
MIT Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Terms of Use
M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission.
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