Design and prototype fabrication of a manipulator for semiconductor test equipment

Vallance, Robert Ryan

Design and prototype fabrication of a manipulator for semiconductor test equipment

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Author(s)

Vallance, Robert Ryan

Advisor(s)

Alexander H. Slocum.

Date Issued

1996

Publisher

Massachusetts Institute of Technology

Description

Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1996.

Subjects

Mechanical Engineering

MIT Department

Massachusetts Institute of Technology. Department of Mechanical Engineering

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