Design and implementation of a high precision profilometer
Name
46972888-MIT.pdf
Description
Full printable version
Size
6.31 MB
Format
Adobe PDF
Checksum (MD5)
7b8939e91fe1dfaf0b614496387c9a0d
Author(s)
Kwok, Tarzen
Advisor(s)
Kamal Youcef-Toumi.
Date Issued
1995
Publisher
Massachusetts Institute of Technology
Abstract
A high precision profilometry system was developed primarily for the inspection of two-sided sample specimens. Based upon system specifications and requirements, it was found that the most suitable profilometry technique was atomic force microscopy (AFM). The major components of the profilometer were: 1) a commercial atomic force microscope, 2) customized sample positioning hardware, 3) image processing and control software, and 4) system calibration procedures. The primary focus of this thesis is on the design and implementation of the customized blade positioning hardware, consisting of two linear stages stacked to form an X-Y table and a novel 'flip' stage which allows both sides of the sample to be measured by the AFM. The flip stage uses a kinematic coupling design to achieve the necessary positioning precision and stability. A homogeneous transformation matrix (HTM) method was developed for calculating the profiling errors due to stage positioning errors. The actual performance and calibration of the profilometer system was investigated through various tests, including: 1) measurement / positioning repeatibility tests of individual components, 2) measurement accuracy tests (documented in a separate report), and 3) other tests, such as determination of measurement sensitivity, drift rates, and system natural frequency.
Description
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1995.
Includes bibliographical references (p. 113-117 [i.e. p. [86]-[88]).
Subjects
Mechanical Engineering.
MIT Department
Massachusetts Institute of Technology. Department of Mechanical Engineering
Terms of Use
M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission.
Persistent DSpace Link
