Crystallization in self-implanted polycrystalline silicon-on-insulator films
Name
17397325-MIT.pdf
Description
Full printable version
Size
4.77 MB
Format
Adobe PDF
Checksum (MD5)
efbea75ee3f7980a4c059df2c734d91d
Author(s)
Iverson, Ralph Benhart
Advisor(s)
L. Rafael Reif.
Date Issued
1987
Publisher
Massachusetts Institute of Technology
Description
Bibliography: leaves 118-122.
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1987.
Subjects
Electrical Engineering and Computer Science.
MIT Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
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