Investigation on Thin Film Lithium Microbatteries
Name
AMMNS025.pdf
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12.35 KB
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Adobe PDF
Checksum (MD5)
b6b4f41d57992cbe11e672fb86d5ed71
Author(s)
Shi, Z.
Lü, L.
Ceder, Gerbrand
Date Issued
January 2004
Series/Report no.
Advanced Materials for Micro- and Nano-Systems (AMMNS);
Abstract
Thin film lithium microbatteries were investigated in this project in which LiCoO₂ cathodes about 200 to 500 nm were fabricated by pulsed-laser deposition (PLD) at different processing parameters such as laser energy and fluence, substrate temperature, background gas pressure, and target-substrate distance. Structure, microstructure and composition of as-deposited LiCoO₂ films were determined by XRD, SEM and XPS. Optimal deposition parameters were identified. Relaxation of open-circuit voltage of as-prepared cells and charge-discharge cycling were conducted to characterize the electrochemical properties of microbatteries made of these LiCoO₂ films.
Subjects
thin film lithium microbatteries
pulsed-laser deposition
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