Focused Ion Beam Fabrication
Name
RLE_PR_129_03.pdf
Size
279.99 KB
Format
Adobe PDF
Checksum (MD5)
a005265133c096ba6bae309754642a5f
Author(s)
Melngailis, John
Lezec, Henri J.
Mahoney, Leonard J.
Jacobs, Jarvis B.
Lowther, Rex E.
Musil, Christian R.
Antoniadis, Dimitri A.
Shedd, Gordon M.
Dubner, Andrew D.
Thompson, Carl V.
Date Issued
January 1987
Publisher
Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT)
Series/Report no.
Massachusetts Institute of Technology. Research Laboratory of Electronics. Progress Report, no. 129
Description
Contains reports on five research projects.
Terms of Use
Copyright (c) 2008 by the Massachusetts Institute of Technology. All rights reserved.
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