A Novel Testing Apparatus for Tribological Studies at the Small Scale
Name
AMMNS017.PDF
Size
3.24 MB
Format
Adobe PDF
Checksum (MD5)
67bda9360b28d1e76fd500c47fcb36a1
Author(s)
Gearing, B.P.
Anand, Lallit
Date Issued
January 2002
Series/Report no.
Advanced Materials for Micro- and Nano-Systems (AMMNS);
Abstract
A novel flexure-based biaxial compression/shear apparatus has been designed, built, and utilized to conduct tribological studies of interfaces relevant to MEMS. Aspects of our new apparatus are detailed and its capabilities are demonstrated by an investigation of two interfaces for MEMS applications. Tribological tests may be performed with normal and tangential forces in the µN to N range and relative sliding displacements in the nm to mm range. In this testing range, the new experimental apparatus represents an improvement over existing techniques for tribological studies at the small scale.
Subjects
MEMS
friction
mechanical testing
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