Growth and characterization of low temperature silicon selective epitaxy
Name
24250400-MIT.pdf
Description
Full printable version
Size
24.12 MB
Format
Adobe PDF
Checksum (MD5)
83d688a4bf30a60c76607975d664915f
Author(s)
Yew, Tri-Rung
Advisor(s)
Rafael Reif.
Date Issued
1990
Publisher
Massachusetts Institute of Technology
Description
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1990.
Includes bibliographical references (leaves 204-210).
Subjects
Materials Science and Engineering
MIT Department
Massachusetts Institute of Technology. Department of Materials Science and Engineering
Terms of Use
M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission.
Persistent DSpace Link