On-line control of process uniformity using categorized variabilities

Ha, Sungdo

On-line control of process uniformity using categorized variabilities

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29019988-MIT.pdf

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Author(s)

Ha, Sungdo

Advisor(s)

Emanuel Sachs.

Date Issued

1993

Publisher

Massachusetts Institute of Technology

Description

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1993.

Includes bibliographical references (leaves 141-147).

Subjects

Mechanical Engineering

MIT Department

Massachusetts Institute of Technology. Department of Mechanical Engineering

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