Experimental characterization and physical modeling of resolution limits in proximity printing x-ray lithography
Name
24652458-MIT.pdf
Description
Full printable version
Size
12.14 MB
Format
Adobe PDF
Checksum (MD5)
b2e65d012b7bfaabc6752cf16f1af758
Author(s)
Early, Kathleen
Advisor(s)
Henry I. Smith.
Date Issued
1991
Publisher
Massachusetts Institute of Technology
Description
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1991.
Includes bibliographical references (leaves 179-187).
Subjects
Electrical Engineering and Computer Science
MIT Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Terms of Use
M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission.
Persistent DSpace Link
