A general methodology for assessing and characterizing variation in semiconductor manufacturing
Name
39134597-MIT.pdf
Description
Full printable version
Size
14.63 MB
Format
Adobe PDF
Checksum (MD5)
20f09234ac9e7d12e2a006a4fa0f3299
Author(s)
Stine, Brian E. (Brian Eugene), 1971-
Advisor(s)
Duane S. Bonging, James E. Chung.
Date Issued
1998
Publisher
Massachusetts Institute of Technology
Description
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1998.
Includes bibliographical references (leaves 186-192).
Subjects
Electrical Engineering and Computer Science
MIT Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Terms of Use
M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission.
Persistent DSpace Link
