GaN Based Nanomaterials Fabrication with Anodic Aluminium Oxide by MOCVD
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AMMNS012.pdf
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Author(s)
Wang, Yadong
Sander, Melissa
Peng, Chen
Chua, Soo-Jin
Fonstad, Clifton G. Jr.
Date Issued
January 2003
Series/Report no.
Advanced Materials for Micro- and Nano-Systems (AMMNS);
Abstract
A highly self-ordered hexagonal array of cylindrical pores has been fabricated by anodizing a thin film of Al on substrate and subsequent growth of GaN and InGaN in these nanoholes has been performed. This AAO template-based synthesis method provides a low cost process to fabricate GaN-based nanomaterials fabrication.
Subjects
GaN-based nanomaterials fabrication
template synthesis
anodic porous alumina
AAO template
nitride nanowire arrays
anodic aluminium oxide template
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