A six-degree of freedom flexural positioning stage
Name
53093882-MIT.pdf
Description
Full printable version
Size
15.48 MB
Format
Adobe PDF
Checksum (MD5)
45e74b95d53f030c9d0c8fd35be01287
Author(s)
Anderson, Gordon A. B. (Gordon Alexander Brewster), 1977-
Advisor(s)
Martin Culpepper.
Date Issued
2003
Publisher
Massachusetts Institute of Technology
Abstract
A novel, low-cost positioning stage was constructed using a six-axis compliant mechanism driven by three two-axis electromagnetic actuators. The mechanism's monolithic, planar geometry is easily fabricated with low-cost manufacturing processes (such as waterjet machining). The manipulator tolerates ±1 mm actuator misalignment with less than 0.1% full-scale position error. Measurements over a 100x100x100 nm3 work volume displayed resolution better than the sensing capability, 5nm, and open-loop linearity errors less than 0.005% of the full-scale range (100 [mu]m). Measurements over a 100x100x100 [mu]m3 work volume exhibited linearity errors less than 0.20% full-scale. The mechanism's equilateral symmetry and planar geometry restricted thermal drift rates at start-up to 23nm and 4 [mu]tradians over 30 minutes and 0.1°C temperature change. The manipulator, built for $ 2000 (excluding electronics), was successfully tested in a fiber optic alignment application.
Description
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2003.
Includes bibliographical references (p. 134-136).
Subjects
Mechanical Engineering.
MIT Department
Massachusetts Institute of Technology. Department of Mechanical Engineering
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