5000 Groove/mm multilayer-coated blazed grating with 33% efficiency in the 3rd order in the EUV wavelength range
Name
Voronov-2009-5000 Groovemm multilayer-coated blazed grating with 33% efficiency in the 3rd order in the EUV wavelength range.pdf
Size
2.27 MB
Format
Adobe PDF
Checksum (MD5)
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Author(s)
Schattenburg, Mark Lee
Chang, Chih-Hao
Ahn, Minseung
Padmore, Howard A.
Yashchuk, Valeriy V.
Gullikson, Eric M.
Salmassi, Farhad
Cambie, Rossana
Anderson, Erik H.
Voronov, Dmitriy L.
Date Issued
September 2009
Journal
Proceedings of SPIE
Publisher
The International Society for Optical Engineering
Citation
Voronov, Dmitriy L. “5000 groove/mm multilayer-coated blazed grating with 33percent efficiency in the 3rd order in the EUV wavelength range” Lawrence Berkeley National Laboratory: Lawrence Berkeley National Laboratory. LBNL Paper LBNL-2275E © 2009 SPIE--The International Society for Optical Engineering
Version
Final published version
Abstract
We report on recent progress in developing diffraction gratings which can potentially provide extremely high spectral resolution of 10[superscript 5]-10[superscript 6] in the EUV and soft x-ray photon energy ranges. Such a grating was fabricated by deposition of a multilayer on a substrate which consists of a 6-degree blazed grating with a high groove density. The fabrication of the substrate gratings was based on scanning interference lithography and anisotropic wet etch of silicon single crystals. The optimized fabrication process provided precise control of the grating periodicity, and the grating groove profile, together with very short anti-blazed facets, and near atomically smooth surface blazed facets. The blazed grating coated with 20 Mo/Si bilayers demonstrated a diffraction efficiency in the third order as high as 33% at an incidence angle of 11° and wavelength of 14.18 nm. This work was supported by the US Department of Energy under contract number DE-AC02-05CH11231.
MIT Department
MIT Kavli Institute for Astrophysics and Space Research
Terms of Use
Article is made available in accordance with the publisher's policy and may be subject to US copyright law. Please refer to the publisher's site for terms of use.
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DOI of Published Version
http://dx.doi.org/10.1117/12.826921
