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  5. A laser-assisted microchemistry system for the fabrication of small electromechanical devices

A laser-assisted microchemistry system for the fabrication of small electromechanical devices

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Author(s)
Nassuphis, Nick I
Advisor(s)
D.J. Ehrlich, A. Slocum.
Date Issued
1994
Publisher
Massachusetts Institute of Technology
Description
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1994.
Includes bibliographical references (leaves 80-82).
Subjects
Mechanical Engineering
MIT Department
Massachusetts Institute of Technology. Department of Mechanical Engineering
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M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission.
http://dspace.mit.edu/handle/1721.1/7582
Persistent DSpace Link
http://hdl.handle.net/1721.1/36928
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