A laser-assisted microchemistry system for the fabrication of small electromechanical devices

Nassuphis, Nick I

A laser-assisted microchemistry system for the fabrication of small electromechanical devices

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Author(s)

Nassuphis, Nick I

Advisor(s)

D.J. Ehrlich, A. Slocum.

Date Issued

1994

Publisher

Massachusetts Institute of Technology

Description

Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1994.

Includes bibliographical references (leaves 80-82).

Subjects

Mechanical Engineering

MIT Department

Massachusetts Institute of Technology. Department of Mechanical Engineering

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http://dspace.mit.edu/handle/1721.1/7582

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http://hdl.handle.net/1721.1/36928