Magnetic bearing stages for electron beam lithography

Konkola, Paul Thomas, 1973-

Magnetic bearing stages for electron beam lithography

Download

Name

44021880-MIT.pdf

Description

Full printable version

Size

13.39 MB

Format

Adobe PDF

Checksum (MD5)

741ccc5f36c0809b22fbcfb6e069a227

Author(s)

Konkola, Paul Thomas, 1973-

Advisor(s)

David L. Trumper.

Date Issued

1998

Publisher

Massachusetts Institute of Technology

Description

Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1998.

Includes bibliographical references (p. 217-220).

Subjects

Mechanical Engineering.

MIT Department

Massachusetts Institute of Technology. Department of Mechanical Engineering

Terms of Use

M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission.

http://dspace.mit.edu/handle/1721.1/7582

Persistent DSpace Link

http://hdl.handle.net/1721.1/9315