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  5. Free-standing 100 nm period gratings produced by achromatic holographic lithography

Free-standing 100 nm period gratings produced by achromatic holographic lithography

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Author(s)
Shah, Satyen N. (Satyen Navin)
Advisor(s)
Henry I. Smith.
Date Issued
1995
Publisher
Massachusetts Institute of Technology
Description
Thesis (M. Eng.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1995.
Includes bibliographical references (leaf 44).
Subjects
Electrical Engineering and Computer Science
MIT Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
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M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission.
http://dspace.mit.edu/handle/1721.1/7582
Persistent DSpace Link
http://hdl.handle.net/1721.1/11466
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