Free-standing 100 nm period gratings produced by achromatic holographic lithography
Name
33351689-MIT.pdf
Description
Full printable version
Size
2.78 MB
Format
Adobe PDF
Checksum (MD5)
a5b9d1ed630b34826797f6af93204d3d
Author(s)
Shah, Satyen N. (Satyen Navin)
Advisor(s)
Henry I. Smith.
Date Issued
1995
Publisher
Massachusetts Institute of Technology
Description
Thesis (M. Eng.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1995.
Includes bibliographical references (leaf 44).
Subjects
Electrical Engineering and Computer Science
MIT Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Terms of Use
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