Contrast enhancement behavior of hydrogen silsesquioxane in a salty developer
Name
Berggren-Contrast enhancement.pdf
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Author(s)
Nam, Sung-Wook
Rooks, Michael J.
Yang, Joel K. W.
Berggren, Karl K.
Kim, Hyun-Mi
Lee, Min-Hyun
Kim, Ki-Bum
Sim, Jae Hwan
Yoon, Do Yeung
Date Issued
December 2009
Journal
Journal of Vacuum Science and Technology B Microelectronics and Nanometer Structures
Publisher
American Vacuum Society (AVS)
Citation
Nam, Sung-Wook et al. “Contrast Enhancement Behavior of Hydrogen Silsesquioxane in a Salty Developer.” Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 27.6 (2009): 2635. © 2009 American Vacuum Society
Version
Final published version
Abstract
The authors investigated a contrast enhancement behavior of hydrogen silsesquioxane (HSQ) in a salty development system (NaOH/NaCl). Time-resolved analysis of contrast curves and line-grating patterns were carried out to investigate the unique properties of a salty development process. In NaOH developer without salt, the development process was saturated beyond a certain development time. On the other hand, the addition of salt enabled a continuous development, which was not observed in the pure NaOH development. The continuous thinning process enhances the contrast of HSQ in the salty developer, which allows a fast collapsing behavior in HSQ line-grating patterns. During development process, salt seems to have the role of modifying HSQ by breaking network bonds preferentially, leading to a continuous development rate.
MIT Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
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Article is made available in accordance with the publisher's policy and may be subject to US copyright law. Please refer to the publisher's site for terms of use.
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DOI of Published Version
https://doi.org/10.1116/1.3245991
