Novel techniques for the run by run process control of chemical-mechanical polishing
Name
35968751-MIT.pdf
Description
Full printable version
Size
20.02 MB
Format
Adobe PDF
Checksum (MD5)
9746de6d6ac4e8191ba8e499ac8164bb
Author(s)
Smith, Taber H. (Taber Hardesty)
Advisor(s)
Duane S. Boning.
Date Issued
1996
Publisher
Massachusetts Institute of Technology
Description
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1996.
Includes bibliographical references (p. 139-143).
Subjects
Electrical Engineering and Computer Science
MIT Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Terms of Use
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