Membrane-integrated superconducting nanowire single-photon detectors
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Membrane-SNSPD_CLEO2013_v6.pdf
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Main Article
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Author(s) • • • • • • • • •
Najafi, Faraz
Mower, Jacob
Hu, Xiaolong
Bellei, Francesco
Kharel, Prashanta
Dane, Andrew Edward
Ivry, Yachin
Cheong, Lin Lee
Sunter, Kristen
Englund, Dirk Robert
Date Issued
June 2013
Journal
CLEO: QELS - Fundamental Science
Publisher
Optical Society of America
Citation
Najafi, F., J. Mower, X. Hu, F. Bellei, P. Kharel, A. Dane, Y. Ivry, L. Cheong, K. Sunter, D. Englund and K. K. Berggren. "Membrane-integrated superconducting nanowire single-photon detectors." CLEO: QELS - Fundamental Science, San Jose, California United States, June 9-14, 2013.
Version
Author's final manuscript
Abstract
We integrated superconducting nanowire single-photon detectors on sub-400-nm-thick silicon nitride membranes, which can then be transferred and aligned to photonic structures on a secondary chip with sub-micron placement accuracy.
Description
CLEO: QELS--Fundamental Science, San Jose, California United States, June 9-14, 2013
MIT Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
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Creative Commons Attribution-Noncommercial-Share Alike
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DOI of Published Version
https://doi.org/10.1364/CLEO_QELS.2013.QF1A.6