Infrared transmissometer to measure the thickness of NbN thin films
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Berggren_Infared transmissometer.pdf
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Author(s)
Sunter, Kristen A.
Lang, Christopher I.
Berggren, Karl K.
Dane, Andrew Edward
Date Issued
June 2015
Journal
Applied Optics
Publisher
Optical Society of America
Citation
Sunter, Kristen A., Andrew E. Dane, Christopher I. Lang, and Karl K. Berggren. “Infrared Transmissometer to Measure the Thickness of NbN Thin Films.” Applied Optics 54, no. 18 (2015): 5743.
Version
Author's final manuscript
Abstract
We present an optical setup that can be used to characterize the thicknesses of thin NbN films to screen samples for fabrication and to better model the performance of the resulting superconducting nanowire single photon detectors. The infrared transmissometer reported here is easy to use, gives results within minutes, and is nondestructive. Thus, the thickness measurement can be easily integrated into the workflow of deposition and characterization. Comparison to a similar visible-wavelength transmissometer is provided.
MIT Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Massachusetts Institute of Technology. Research Laboratory of Electronics
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Creative Commons Attribution-Noncommercial-Share Alike
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DOI of Published Version
https://doi.org/10.1364/ao.54.005743
