High-resolution micromachined interferometric accelerometer

Loh, Nin C. (Nin Chin), 1977-

High-resolution micromachined interferometric accelerometer

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Author(s)

Loh, Nin C. (Nin Chin), 1977-

Advisor(s)

George Barbastathis.

Date Issued

2001

Publisher

Massachusetts Institute of Technology

Description

Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2001.

Includes bibliographical references (p. 74-75).

Subjects

Mechanical Engineering.

MIT Department

Massachusetts Institute of Technology. Department of Mechanical Engineering

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http://hdl.handle.net/1721.1/89324