Low-loss photonic device in Ge–Sb–S chalcogenide glass
Name
Low Loss Photonic Device in Ge-Sb-S Chalcogenide Glass.pdf
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1.1 MB
Format
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Checksum (MD5)
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Author(s)
Novak, Spencer
Richardson, Kathleen
Du, Qingyang
Huang, Yizhong
Li, Junying
Kita, Derek M.
Michon, Jerome
Lin, Hongtao
Li, Lan
Zhang, Wei
Date Issued
June 2016
Journal
Optics Letters
Publisher
Optical Society of America
Citation
Du, Qingyang et al. “Low-Loss Photonic Device in Ge–Sb–S Chalcogenide Glass.” Optics Letters 41, 13 (June 2016): 3090-3093 © 2016 Optical Society of America
Version
Author's final manuscript
Abstract
Low-loss waveguides constitute an important building block for integrated photonic systems. In this work, we investigated low-loss photonic device fabrication in Ge₂₃Sb₇S₇₀ chalcogenide glass using electron beam lithography followed by plasma dry etching. High-index-contrast waveguides with a low propagation loss of 0.5 dB/cm and microdisk resonators with an intrinsic quality factor (𝑄-factor) of 1.2×10⁶ were demonstrated. Both figures represent, to the best of our knowledge, the best low-loss results reported thus far in submicrometer single-mode chalcogenide glass devices.
MIT Department
Massachusetts Institute of Technology. Department of Materials Science and Engineering
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Creative Commons Attribution-Noncommercial-Share Alike
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DOI of Published Version
https://doi.org/10.1364/OL.41.003090
