Geometric simulation of microfabricated structures
Name
32887206-MIT.pdf
Description
Full printable version
Size
21.31 MB
Format
Adobe PDF
Checksum (MD5)
7e29eae9e613e03ca512ca64b4efd6bd
Author(s)
Harris, Robert Michael
Advisor(s)
Stephen D. Senturia.
Date Issued
1995
Publisher
Massachusetts Institute of Technology
Description
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1995.
Includes bibliographical references (p. 295-302).
Subjects
Electrical Engineering and Computer Science
MIT Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Terms of Use
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